Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017 |
| Seiten | 50-56 |
| Seitenumfang | 7 |
| ISBN (elektronisch) | 9783957350572 |
| Publikationsstatus | Veröffentlicht - 2017 |
| Veranstaltung | International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017 - Cork, Irland Dauer: 8 März 2017 → 9 März 2017 |
Publikationsreihe
| Name | International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017 |
|---|
ASJC Scopus Sachgebiete
- Informatik (insg.)
- Angewandte Informatik
- Informatik (insg.)
- Artificial intelligence
- Informatik (insg.)
- Computernetzwerke und -kommunikation
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International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017. 2017. S. 50-56 (International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Electrical feed through for tool integrated high temperature applications
AU - Dencker, Folke
AU - Kolodziejczyk, Felix
AU - Wurz, Marc Christopher
N1 - Funding Information: This work was funded by the German FOSTA and the German AIF at the Institute of Micro Production Technology, Centre for Production Technology, Leibniz Universität Hannover, Germany. The authors thank Christoph Huebsch (Institute for Material Sciences, Leibniz Universitaet Hannover) for the XRD measurements and Eike Fischer (Institute of Micro Production Technology, Leibniz Universitaet Hannover) for revision. Copyright: Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2017
Y1 - 2017
UR - http://www.scopus.com/inward/record.url?scp=85032297710&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85032297710
T3 - International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017
SP - 50
EP - 56
BT - International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017
T2 - International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017
Y2 - 8 March 2017 through 9 March 2017
ER -