Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Laser-Induced Damage in Optical Materials: 2001 |
| Untertitel | 33rd Annual Boulder Damage Symposium proceedings ; 1 - 2 October 2001, Boulder, Colorado |
| Erscheinungsort | Bellingham |
| Herausgeber (Verlag) | SPIE |
| Seiten | 420-428 |
| Seitenumfang | 9 |
| ISBN (Print) | 0-8194-4418-9 |
| Publikationsstatus | Veröffentlicht - 9 Apr. 2002 |
| Extern publiziert | Ja |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Herausgeber (Verlag) | SPIE |
| Band | 4679 |
| ISSN (Print) | 0277-786X |
Abstract
In previous years different multilayer systems were investigated with respect to their optical performance at the wavelength 193 nm of the ArF excimer laser. For most applications in this spectral range, fluoride coatings have been qualified and are widely established. Even though the applicability of oxide coatings is strongly restricted by the significant intrinsic absorptance of the Al2O3 component, these materials are utilised for special technology fields. In contrast to the dielectric deposition materials, the potentiality of protected and enhanced metal layer systems has not been investigated in detail as a basis for high reflectivity mirrors at the wavelength of 193 nm. The major advantage of metal layers is their relatively high reflectivity which can be achieved at low film thickness. Thus metal layers can be employed as a substitution of the first HL-pairs in a high reflecting dielectric stack, and the number of layers can be drastically reduced. Furthermore, the upper residual fluoride stack shields the metal coating from the E-field improving the power handling capability of the metal layer structure. The present investigations are focused on the determination of the absorptance in dependence on the different number of fluoride HL-pairs in metal/dielectric layer systems. In order to elucidate this loss channel, the laser calorimetric (LCA) method in accordance to ISO 11551 is employed. The dynamic behaviour of the absorptance is measured on the basis of the thermal lens technique (TL) using the obtained data of the LCA method for calibration. With regard to both experimental methods, the absorptance can be defined in a wide range of fluence values including the damage onset, and the laser induced damage behaviour of the coatings can be studied.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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Laser-Induced Damage in Optical Materials: 2001: 33rd Annual Boulder Damage Symposium proceedings ; 1 - 2 October 2001, Boulder, Colorado. Bellingham: SPIE, 2002. S. 420-428 (Proceedings of SPIE - The International Society for Optical Engineering; Band 4679).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Dynamic absorptance behavior of hybrid multilayers at 193 nm
AU - Blaschke, Holger
AU - Jupé, Marco
AU - Ristau, Detlev
AU - Martin, Sven
AU - Bock, S.
AU - Welsch, E.
PY - 2002/4/9
Y1 - 2002/4/9
N2 - In previous years different multilayer systems were investigated with respect to their optical performance at the wavelength 193 nm of the ArF excimer laser. For most applications in this spectral range, fluoride coatings have been qualified and are widely established. Even though the applicability of oxide coatings is strongly restricted by the significant intrinsic absorptance of the Al2O3 component, these materials are utilised for special technology fields. In contrast to the dielectric deposition materials, the potentiality of protected and enhanced metal layer systems has not been investigated in detail as a basis for high reflectivity mirrors at the wavelength of 193 nm. The major advantage of metal layers is their relatively high reflectivity which can be achieved at low film thickness. Thus metal layers can be employed as a substitution of the first HL-pairs in a high reflecting dielectric stack, and the number of layers can be drastically reduced. Furthermore, the upper residual fluoride stack shields the metal coating from the E-field improving the power handling capability of the metal layer structure. The present investigations are focused on the determination of the absorptance in dependence on the different number of fluoride HL-pairs in metal/dielectric layer systems. In order to elucidate this loss channel, the laser calorimetric (LCA) method in accordance to ISO 11551 is employed. The dynamic behaviour of the absorptance is measured on the basis of the thermal lens technique (TL) using the obtained data of the LCA method for calibration. With regard to both experimental methods, the absorptance can be defined in a wide range of fluence values including the damage onset, and the laser induced damage behaviour of the coatings can be studied.
AB - In previous years different multilayer systems were investigated with respect to their optical performance at the wavelength 193 nm of the ArF excimer laser. For most applications in this spectral range, fluoride coatings have been qualified and are widely established. Even though the applicability of oxide coatings is strongly restricted by the significant intrinsic absorptance of the Al2O3 component, these materials are utilised for special technology fields. In contrast to the dielectric deposition materials, the potentiality of protected and enhanced metal layer systems has not been investigated in detail as a basis for high reflectivity mirrors at the wavelength of 193 nm. The major advantage of metal layers is their relatively high reflectivity which can be achieved at low film thickness. Thus metal layers can be employed as a substitution of the first HL-pairs in a high reflecting dielectric stack, and the number of layers can be drastically reduced. Furthermore, the upper residual fluoride stack shields the metal coating from the E-field improving the power handling capability of the metal layer structure. The present investigations are focused on the determination of the absorptance in dependence on the different number of fluoride HL-pairs in metal/dielectric layer systems. In order to elucidate this loss channel, the laser calorimetric (LCA) method in accordance to ISO 11551 is employed. The dynamic behaviour of the absorptance is measured on the basis of the thermal lens technique (TL) using the obtained data of the LCA method for calibration. With regard to both experimental methods, the absorptance can be defined in a wide range of fluence values including the damage onset, and the laser induced damage behaviour of the coatings can be studied.
KW - Enhanced metal coatings
KW - ISO 11551
KW - Laser calorimetry
KW - LIDT
KW - Predamage
KW - Thermal lens technique
KW - UV dielectric coatings
UR - http://www.scopus.com/inward/record.url?scp=0036033415&partnerID=8YFLogxK
U2 - 10.1117/12.461688
DO - 10.1117/12.461688
M3 - Conference contribution
AN - SCOPUS:0036033415
SN - 0-8194-4418-9
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 420
EP - 428
BT - Laser-Induced Damage in Optical Materials: 2001
PB - SPIE
CY - Bellingham
ER -