Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Laser-Induced Damage in Optical Materials |
| Untertitel | 2002 and 7th International Workshop on Laser Beam and Optics Characterization |
| Erscheinungsort | Bellingham |
| Herausgeber (Verlag) | SPIE |
| Seiten | 536-543 |
| Seitenumfang | 8 |
| ISBN (Print) | 0-8194-4727-7 |
| Publikationsstatus | Veröffentlicht - 30 Mai 2003 |
| Extern publiziert | Ja |
| Veranstaltung | Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization - Boulder, CO, USA / Vereinigte Staaten Dauer: 16 Sept. 2002 → 18 Sept. 2002 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Herausgeber (Verlag) | SPIE |
| Band | 4932 |
| ISSN (Print) | 0277-786X |
Abstract
The development of characterization tools for the deep-ultraviolet (DUV)/vacuum-ultraviolet (VUV) spectral range gains of increasing importance considering the applicability of optics in adequate facilities. At the Laser Zentrum Hannover, procedures for the investigation of optical parameters, i.e. transmittance, reflectance, absorption and scattering, are developed. In the last two years, a spectrophotometric unit was redesigned allowing a comprehensive characterization of optical components in the wavelength range between 115nm and 310nm. The paper describes the developed device in detail and discusses the sources of error with regard to their influence on measured data. Different investigations were performed and are presented in dependence on the wavelength, the adjusted angle of incidence (AOI) and the polarization of the incident beam. Furthermore, numerous measuring methods are explained which are supported by the in-house compiled software package.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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- BibTex
- RIS
Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization. Bellingham: SPIE, 2003. S. 536-543 (Proceedings of SPIE - The International Society for Optical Engineering; Band 4932).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - DUV/VUV spectrophotometry for high precision spectral characterization
AU - Blaschke, Holger
AU - Kohlhaas, Jürgen
AU - Kadkhoda, Puja
AU - Ristau, Detlev
PY - 2003/5/30
Y1 - 2003/5/30
N2 - The development of characterization tools for the deep-ultraviolet (DUV)/vacuum-ultraviolet (VUV) spectral range gains of increasing importance considering the applicability of optics in adequate facilities. At the Laser Zentrum Hannover, procedures for the investigation of optical parameters, i.e. transmittance, reflectance, absorption and scattering, are developed. In the last two years, a spectrophotometric unit was redesigned allowing a comprehensive characterization of optical components in the wavelength range between 115nm and 310nm. The paper describes the developed device in detail and discusses the sources of error with regard to their influence on measured data. Different investigations were performed and are presented in dependence on the wavelength, the adjusted angle of incidence (AOI) and the polarization of the incident beam. Furthermore, numerous measuring methods are explained which are supported by the in-house compiled software package.
AB - The development of characterization tools for the deep-ultraviolet (DUV)/vacuum-ultraviolet (VUV) spectral range gains of increasing importance considering the applicability of optics in adequate facilities. At the Laser Zentrum Hannover, procedures for the investigation of optical parameters, i.e. transmittance, reflectance, absorption and scattering, are developed. In the last two years, a spectrophotometric unit was redesigned allowing a comprehensive characterization of optical components in the wavelength range between 115nm and 310nm. The paper describes the developed device in detail and discusses the sources of error with regard to their influence on measured data. Different investigations were performed and are presented in dependence on the wavelength, the adjusted angle of incidence (AOI) and the polarization of the incident beam. Furthermore, numerous measuring methods are explained which are supported by the in-house compiled software package.
KW - DUV/VUV
KW - ISO/DIS 15368
KW - Rowland circle
KW - Seya-Namioka
UR - http://www.scopus.com/inward/record.url?scp=0042862968&partnerID=8YFLogxK
U2 - 10.1117/12.472387
DO - 10.1117/12.472387
M3 - Conference contribution
AN - SCOPUS:0042862968
SN - 0-8194-4727-7
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 536
EP - 543
BT - Laser-Induced Damage in Optical Materials
PB - SPIE
CY - Bellingham
T2 - Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization
Y2 - 16 September 2002 through 18 September 2002
ER -