Details
| Originalsprache | Englisch |
|---|---|
| Fachzeitschrift | IEEE sensors journal |
| Publikationsstatus | Elektronisch veröffentlicht (E-Pub) - 2024 |
Abstract
Many industrial production processes use sensors to generate information about the manufacturing process. In this way, monitoring machine tools ensures the proper functionality of the system and detects unexpected behavior due to, for example, material inhomogeneity, incorrect data input, temperature influence or tool wear. In large production machines, such as portal milling machines, the sensor equipment of guide carriages can be an important possibility since they are a standardized component and can be easily integrated into existing machines. Here, conventional polymer foil-based strain gauges show several disadvantages due to reproducibility and reliability of the sensor connection via adhesive. Thus, this article addresses the manufacturing of directly-deposited chromium thin-film strain gauges on a guide carriage with integrated programmable data pre-amplification. Tests with different sensor materials on steel substrates showed that chromium was the most suitable sensor material with a high k-factor. Then, one end face of the carriage was polished before sputtering an Al2O3 insulation layer and a chromium sensor layer that was laser-structured afterward to produce two Wheatstone full-bridges at previously simulated sensor positions. In a tensile test stand, the calibration of the sensors took place in the two spatial directions perpendicular to the guide rail direction. With an additional sensor data fusion for the final interpretation of measured forces, it is shown that this sensor technology is suitable for force measurement at guide carriages.
ASJC Scopus Sachgebiete
- Physik und Astronomie (insg.)
- Instrumentierung
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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in: IEEE sensors journal, 2024.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - Directly Deposited Thin-Film Strain Gauges for Force Measurement at Guide Carriages
AU - Ottermann, Rico
AU - Kowalke, Dennis
AU - Denkena, Berend
AU - Korbacher, Michael
AU - Müller, Matthias
AU - Wurz, Marc Christopher
N1 - Publisher Copyright: © 2001-2012 IEEE.
PY - 2024
Y1 - 2024
N2 - Many industrial production processes use sensors to generate information about the manufacturing process. In this way, monitoring machine tools ensures the proper functionality of the system and detects unexpected behavior due to, for example, material inhomogeneity, incorrect data input, temperature influence or tool wear. In large production machines, such as portal milling machines, the sensor equipment of guide carriages can be an important possibility since they are a standardized component and can be easily integrated into existing machines. Here, conventional polymer foil-based strain gauges show several disadvantages due to reproducibility and reliability of the sensor connection via adhesive. Thus, this article addresses the manufacturing of directly-deposited chromium thin-film strain gauges on a guide carriage with integrated programmable data pre-amplification. Tests with different sensor materials on steel substrates showed that chromium was the most suitable sensor material with a high k-factor. Then, one end face of the carriage was polished before sputtering an Al2O3 insulation layer and a chromium sensor layer that was laser-structured afterward to produce two Wheatstone full-bridges at previously simulated sensor positions. In a tensile test stand, the calibration of the sensors took place in the two spatial directions perpendicular to the guide rail direction. With an additional sensor data fusion for the final interpretation of measured forces, it is shown that this sensor technology is suitable for force measurement at guide carriages.
AB - Many industrial production processes use sensors to generate information about the manufacturing process. In this way, monitoring machine tools ensures the proper functionality of the system and detects unexpected behavior due to, for example, material inhomogeneity, incorrect data input, temperature influence or tool wear. In large production machines, such as portal milling machines, the sensor equipment of guide carriages can be an important possibility since they are a standardized component and can be easily integrated into existing machines. Here, conventional polymer foil-based strain gauges show several disadvantages due to reproducibility and reliability of the sensor connection via adhesive. Thus, this article addresses the manufacturing of directly-deposited chromium thin-film strain gauges on a guide carriage with integrated programmable data pre-amplification. Tests with different sensor materials on steel substrates showed that chromium was the most suitable sensor material with a high k-factor. Then, one end face of the carriage was polished before sputtering an Al2O3 insulation layer and a chromium sensor layer that was laser-structured afterward to produce two Wheatstone full-bridges at previously simulated sensor positions. In a tensile test stand, the calibration of the sensors took place in the two spatial directions perpendicular to the guide rail direction. With an additional sensor data fusion for the final interpretation of measured forces, it is shown that this sensor technology is suitable for force measurement at guide carriages.
KW - Condition Monitoring
KW - Direct Deposition
KW - Force Measurement
KW - Guide Carriages
KW - K-factor
KW - Machine Tool
KW - Sensor Integration
KW - Strain Gauges
KW - Temperature Coefficient of Resistance
KW - Thin-Film Sensors
UR - http://www.scopus.com/inward/record.url?scp=85207313746&partnerID=8YFLogxK
U2 - 10.1109/JSEN.2024.3478821
DO - 10.1109/JSEN.2024.3478821
M3 - Article
AN - SCOPUS:85207313746
JO - IEEE sensors journal
JF - IEEE sensors journal
SN - 1530-437X
ER -