Direct hot embossing of microelements by means of photostructurable polyimide

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OriginalspracheEnglisch
Aufsatznummer034506
FachzeitschriftJournal of Micro/ Nanolithography, MEMS, and MOEMS
Jahrgang15
Ausgabenummer3
PublikationsstatusVeröffentlicht - 23 Aug. 2016

Abstract

While automatic hot embossing systems are available for large- and small-scale productions of polymeric devices, one of the process challenges remains to be the manufacturing of precise, durable, and yet inexpensive hot embossing stamps. The use of metallic stamps manufactured by electroplating a photoresist pattern or by precision milling and their replication into silicone molds with UV-lithography, electroplating, and molding techniques is state of the art. Yet, there have been few, if any, thriving attempts to directly emboss polymers by means of bare photoresists, and in particular polyimide-based photoresists, without transferring the photoresist patterns into a different stamp material. We conduct a proof-of-concept by developing hot embossing stamps based on photosensitive polyimide. We focus primarily on the reliability of the aforementioned stamps throughout the hot embossing cycle and the fidelity of pattern transfer onto polymeric films for different microstructural patterns.

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Direct hot embossing of microelements by means of photostructurable polyimide. / Akin, Meriem; Rezem, Maher; Rahlves, Maik et al.
in: Journal of Micro/ Nanolithography, MEMS, and MOEMS, Jahrgang 15, Nr. 3, 034506, 23.08.2016.

Publikation: Beitrag in FachzeitschriftArtikelForschungPeer-Review

Akin M, Rezem M, Rahlves M, Cromwell K, Roth B, Reithmeier E et al. Direct hot embossing of microelements by means of photostructurable polyimide. Journal of Micro/ Nanolithography, MEMS, and MOEMS. 2016 Aug 23;15(3):034506. doi: 10.1117/1.JMM.15.3.034506
Akin, Meriem ; Rezem, Maher ; Rahlves, Maik et al. / Direct hot embossing of microelements by means of photostructurable polyimide. in: Journal of Micro/ Nanolithography, MEMS, and MOEMS. 2016 ; Jahrgang 15, Nr. 3.
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abstract = "While automatic hot embossing systems are available for large- and small-scale productions of polymeric devices, one of the process challenges remains to be the manufacturing of precise, durable, and yet inexpensive hot embossing stamps. The use of metallic stamps manufactured by electroplating a photoresist pattern or by precision milling and their replication into silicone molds with UV-lithography, electroplating, and molding techniques is state of the art. Yet, there have been few, if any, thriving attempts to directly emboss polymers by means of bare photoresists, and in particular polyimide-based photoresists, without transferring the photoresist patterns into a different stamp material. We conduct a proof-of-concept by developing hot embossing stamps based on photosensitive polyimide. We focus primarily on the reliability of the aforementioned stamps throughout the hot embossing cycle and the fidelity of pattern transfer onto polymeric films for different microstructural patterns.",
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AU - Akin, Meriem

AU - Rezem, Maher

AU - Rahlves, Maik

AU - Cromwell, Kevin

AU - Roth, Bernhard

AU - Reithmeier, Eduard

AU - Wurz, Marc Christopher

AU - Rissing, Lutz

AU - Maier, Hans Juergen

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N2 - While automatic hot embossing systems are available for large- and small-scale productions of polymeric devices, one of the process challenges remains to be the manufacturing of precise, durable, and yet inexpensive hot embossing stamps. The use of metallic stamps manufactured by electroplating a photoresist pattern or by precision milling and their replication into silicone molds with UV-lithography, electroplating, and molding techniques is state of the art. Yet, there have been few, if any, thriving attempts to directly emboss polymers by means of bare photoresists, and in particular polyimide-based photoresists, without transferring the photoresist patterns into a different stamp material. We conduct a proof-of-concept by developing hot embossing stamps based on photosensitive polyimide. We focus primarily on the reliability of the aforementioned stamps throughout the hot embossing cycle and the fidelity of pattern transfer onto polymeric films for different microstructural patterns.

AB - While automatic hot embossing systems are available for large- and small-scale productions of polymeric devices, one of the process challenges remains to be the manufacturing of precise, durable, and yet inexpensive hot embossing stamps. The use of metallic stamps manufactured by electroplating a photoresist pattern or by precision milling and their replication into silicone molds with UV-lithography, electroplating, and molding techniques is state of the art. Yet, there have been few, if any, thriving attempts to directly emboss polymers by means of bare photoresists, and in particular polyimide-based photoresists, without transferring the photoresist patterns into a different stamp material. We conduct a proof-of-concept by developing hot embossing stamps based on photosensitive polyimide. We focus primarily on the reliability of the aforementioned stamps throughout the hot embossing cycle and the fidelity of pattern transfer onto polymeric films for different microstructural patterns.

KW - fluidic systems

KW - hot embossing

KW - optical devices

KW - polyimide

KW - stamp fabrication

KW - stamp reliability

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