TY - JOUR

T1 - Development of drive systems based on electromagnetic microactuators

AU - Ganesan, Vijay

AU - Wiedmann, Karsten

AU - Janssen, Gerd

AU - Ponick, Bernd

AU - Mertens, Axel

N1 - Funding Information: Manuscript received July 10, 2010; revised October 25, 2010 and March 18, 2011; accepted April 20, 2011. Date of publication May 5, 2011; date of current version October 25, 2011. This work was supported by the German Research Foundation (DFG) as part of their support for the Collaborative Research Center “Design and Manufacturing of Active Microsystems.” V. Ganesan is with Siemens AG, 90475 Nürnberg, Germany (e-mail: vijay. ganesan@siemens.com). Copyright: Copyright 2011 Elsevier B.V., All rights reserved.

PY - 2011/5/5

Y1 - 2011/5/5

N2 - Electromagnetic microactuators discussed in this paper have been the topic of research during the last decade. Their fabrication is based on batch processes like photolithography and etching of copper and iron, which is deposited on substrates. Resulting from these microfabrication techniques and the small size of motors, the drive system designer faces a very different task when compared to conventional drive systems. Those differences have to be considered in the electromagnetic design of the microactuator itself, as well as in the power supply and the control of the drive. This paper presents an overview of design options for these components of a miniaturized drive system and discusses their advantages and disadvantages from a system point of view.

AB - Electromagnetic microactuators discussed in this paper have been the topic of research during the last decade. Their fabrication is based on batch processes like photolithography and etching of copper and iron, which is deposited on substrates. Resulting from these microfabrication techniques and the small size of motors, the drive system designer faces a very different task when compared to conventional drive systems. Those differences have to be considered in the electromagnetic design of the microactuator itself, as well as in the power supply and the control of the drive. This paper presents an overview of design options for these components of a miniaturized drive system and discusses their advantages and disadvantages from a system point of view.

KW - Microactuators

KW - micromotors

KW - optimal position control

KW - switched-capacitor (SC) converter

UR - http://www.scopus.com/inward/record.url?scp=80155201431&partnerID=8YFLogxK

U2 - 10.1109/TIE.2011.2151815

DO - 10.1109/TIE.2011.2151815

M3 - Article

AN - SCOPUS:80155201431

VL - 59

SP - 1409

EP - 1417

JO - IEEE Transactions on Industrial Electronics

JF - IEEE Transactions on Industrial Electronics

SN - 0278-0046

IS - 3

M1 - 5764524

ER -