TY - GEN

T1 - Development of a Polyimid Membrane for Electromagnetic Middle-Ear Actuators

AU - Glukhovskoy, Anatoly

AU - Müller, Eileen

AU - Prediger, Maren S.

AU - Maier, Hannes

AU - Wurz, Marc Christopher

N1 - Funding Information: The work presented here was part of the master thesis Fer-tigung und Erprobung eines elektromagnetischen Mikro-aktuators zur Stimulierung des Runden Fensters by Eileen Müller, defended in July, 2021. The thesis was supervised by Prof. Dr. phil. nat. Hannes Maier and Dr.-Ing. Marc Christopher Wurz. Technical coordination: Anatoly Glu-khovskoy; project management and manuscript preparation: Maren S. Prediger. The project was funded by the DFG Cluster of Excellence EXC 2177 "Hearing4all 2.0" in the research thread III.

PY - 2021

Y1 - 2021

N2 - For a middle ear microactuator for the stimulation of the round window, based on the principle of the "balanced armature", the manufacturing routes and characterization of two main components are presented and discussed. The parts of a polyimide membrane pre-stressed on a frame and a spacer for magnetic components were processed using micro technology and 3D printing. The resonance frequency, the spring constant, the extensional stiffness and the elastic modulus of the membrane was analysed via laser Doppler vibrometry and nanoindentation. Simulations determined that the membrane ought to have a spring constant of 1.6 kN/m, which were not yet achieved in the final membranes with 1.05 kN/m and 1.33 kN/m. Therefore, further development is necessary to meet the exact requirements for the actuator.

AB - For a middle ear microactuator for the stimulation of the round window, based on the principle of the "balanced armature", the manufacturing routes and characterization of two main components are presented and discussed. The parts of a polyimide membrane pre-stressed on a frame and a spacer for magnetic components were processed using micro technology and 3D printing. The resonance frequency, the spring constant, the extensional stiffness and the elastic modulus of the membrane was analysed via laser Doppler vibrometry and nanoindentation. Simulations determined that the membrane ought to have a spring constant of 1.6 kN/m, which were not yet achieved in the final membranes with 1.05 kN/m and 1.33 kN/m. Therefore, further development is necessary to meet the exact requirements for the actuator.

UR - http://www.scopus.com/inward/record.url?scp=85125197075&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85125197075

T3 - MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings

SP - 186

EP - 189

BT - MikroSystemTechnik Kongress 2021

PB - VDE Verlag GmbH

T2 - MikroSystemTechnik Congress 2021

Y2 - 8 November 2021 through 10 November 2021

ER -