Details
| Originalsprache | Englisch |
|---|---|
| Seiten (von - bis) | 27-34 |
| Fachzeitschrift | Procedia Technology |
| Jahrgang | 26 |
| Publikationsstatus | Veröffentlicht - 1 Okt. 2016 |
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Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers. / Klaas, Daniel; Rein, M.; Wurz, Marc et al.
in: Procedia Technology, Jahrgang 26, 01.10.2016, S. 27-34.
in: Procedia Technology, Jahrgang 26, 01.10.2016, S. 27-34.
Publikation: Beitrag in Fachzeitschrift › Konferenzaufsatz in Fachzeitschrift › Forschung
Klaas, D, Rein, M, Wurz, M & Rissing, L 2016, 'Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers', Procedia Technology, Jg. 26, S. 27-34. https://doi.org/10.1016/j.protcy.2016.08.005
Klaas, D., Rein, M., Wurz, M., & Rissing, L. (2016). Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers. Procedia Technology, 26, 27-34. https://doi.org/10.1016/j.protcy.2016.08.005
Klaas D, Rein M, Wurz M, Rissing L. Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers. Procedia Technology. 2016 Okt 1;26:27-34. doi: 10.1016/j.protcy.2016.08.005
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title = "Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers",
keywords = "humidity sensor, direct deposition, zinc oxide, ZnO, Collaborative Research Centre 653",
author = "Daniel Klaas and M. Rein and Marc Wurz and Lutz Rissing",
year = "2016",
month = oct,
day = "1",
doi = "10.1016/j.protcy.2016.08.005",
language = "English",
volume = "26",
pages = "27--34",
}
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TY - JOUR
T1 - Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers
AU - Klaas, Daniel
AU - Rein, M.
AU - Wurz, Marc
AU - Rissing, Lutz
PY - 2016/10/1
Y1 - 2016/10/1
KW - humidity sensor
KW - direct deposition
KW - zinc oxide
KW - ZnO
KW - Collaborative Research Centre 653
U2 - 10.1016/j.protcy.2016.08.005
DO - 10.1016/j.protcy.2016.08.005
M3 - Conference article
VL - 26
SP - 27
EP - 34
JO - Procedia Technology
JF - Procedia Technology
SN - 2212-0173
ER -