Development of a fast measurement system for microstructured surfaces

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Autoren

  • Renke Scheuer
  • Thomas Mueller
  • Eduard Reithmeier
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Details

OriginalspracheEnglisch
Titel des SammelwerksApplied Industrial Optics
UntertitelSpectroscopy, Imaging and Metrology, AIO 2013
Herausgeber (Verlag)OSA - The Optical Society
Seitenumfang3
ISBN (Print)9781557529756
PublikationsstatusVeröffentlicht - 2013
VeranstaltungApplied Industrial Optics: Spectroscopy, Imaging and Metrology, AIO 2013 - Arlington, VA, USA / Vereinigte Staaten
Dauer: 23 Juni 201327 Juni 2013

Publikationsreihe

NameOptics InfoBase Conference Papers
ISSN (elektronisch)2162-2701

Abstract

This paper describes the development of a measurement system for fast analysis of microstructured surfaces. The main component is a high-speed video camera with a telecentric lens. Measurement speed of 1000 mm2/min can be achieved.

ASJC Scopus Sachgebiete

Zitieren

Development of a fast measurement system for microstructured surfaces. / Scheuer, Renke; Mueller, Thomas; Reithmeier, Eduard.
Applied Industrial Optics: Spectroscopy, Imaging and Metrology, AIO 2013. OSA - The Optical Society, 2013. (Optics InfoBase Conference Papers).

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Scheuer, R, Mueller, T & Reithmeier, E 2013, Development of a fast measurement system for microstructured surfaces. in Applied Industrial Optics: Spectroscopy, Imaging and Metrology, AIO 2013. Optics InfoBase Conference Papers, OSA - The Optical Society, Applied Industrial Optics: Spectroscopy, Imaging and Metrology, AIO 2013, Arlington, VA, USA / Vereinigte Staaten, 23 Juni 2013. https://doi.org/10.1364/aopt.2013.jtu4a.30
Scheuer, R., Mueller, T., & Reithmeier, E. (2013). Development of a fast measurement system for microstructured surfaces. In Applied Industrial Optics: Spectroscopy, Imaging and Metrology, AIO 2013 (Optics InfoBase Conference Papers). OSA - The Optical Society. https://doi.org/10.1364/aopt.2013.jtu4a.30
Scheuer R, Mueller T, Reithmeier E. Development of a fast measurement system for microstructured surfaces. in Applied Industrial Optics: Spectroscopy, Imaging and Metrology, AIO 2013. OSA - The Optical Society. 2013. (Optics InfoBase Conference Papers). doi: 10.1364/aopt.2013.jtu4a.30
Scheuer, Renke ; Mueller, Thomas ; Reithmeier, Eduard. / Development of a fast measurement system for microstructured surfaces. Applied Industrial Optics: Spectroscopy, Imaging and Metrology, AIO 2013. OSA - The Optical Society, 2013. (Optics InfoBase Conference Papers).
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