Details
| Titel in Übersetzung | Design and Fabrication of an Acoustic Transducer based on a Polymer Membrane |
|---|---|
| Originalsprache | Deutsch |
| Titel des Sammelwerks | MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings |
| Herausgeber (Verlag) | VDE Verlag GmbH |
| Seiten | 606-609 |
| Seitenumfang | 4 |
| ISBN (elektronisch) | 9783800741007 |
| Publikationsstatus | Veröffentlicht - 2015 |
| Veranstaltung | MikroSystemTechnik Kongress 2015: MEMS, Mikroelektronik, Systeme - MikroSystemTechnik Conference 2015: MEMS, Microelectronics, Systems - Karlsruhe, Deutschland Dauer: 26 Okt. 2015 → 28 Okt. 2015 |
Publikationsreihe
| Name | MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings |
|---|
Abstract
A concept for an acoustic transducer based on a polymer membrane has been investigated at the Institute for Micro Production Technology at the Leibniz Universität Hannover (IMPT). For this purpose a microphone based on the capacitor principle is developed and manufactured at the IMPT. The focus of this article is on the thinfilm process development, the layout and fabrication of a prototype. The layout of the acoustic transducer is based on a plate capacitor. One electrode is fixed and used as counter electrode and the other electrode is fixed on the flexible polymer membrane.
ASJC Scopus Sachgebiete
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Werkstoffwissenschaften (insg.)
- Oberflächen, Beschichtungen und Folien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Physik und Astronomie (insg.)
- Atom- und Molekularphysik sowie Optik
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- BibTex
- RIS
MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. S. 606-609 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Design und Herstellung eines akustischen Wandlers mit einer Polymermembran
AU - Kaiser, Max
AU - Rechel, Mathias
AU - Goldmann, J.
AU - Rissing, Lutz
AU - Wurz, Marc Christopher
N1 - Publisher Copyright: © Technische Universität Wien.All right reserved. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2015
Y1 - 2015
N2 - A concept for an acoustic transducer based on a polymer membrane has been investigated at the Institute for Micro Production Technology at the Leibniz Universität Hannover (IMPT). For this purpose a microphone based on the capacitor principle is developed and manufactured at the IMPT. The focus of this article is on the thinfilm process development, the layout and fabrication of a prototype. The layout of the acoustic transducer is based on a plate capacitor. One electrode is fixed and used as counter electrode and the other electrode is fixed on the flexible polymer membrane.
AB - A concept for an acoustic transducer based on a polymer membrane has been investigated at the Institute for Micro Production Technology at the Leibniz Universität Hannover (IMPT). For this purpose a microphone based on the capacitor principle is developed and manufactured at the IMPT. The focus of this article is on the thinfilm process development, the layout and fabrication of a prototype. The layout of the acoustic transducer is based on a plate capacitor. One electrode is fixed and used as counter electrode and the other electrode is fixed on the flexible polymer membrane.
UR - http://www.scopus.com/inward/record.url?scp=85096926563&partnerID=8YFLogxK
M3 - Aufsatz in Konferenzband
AN - SCOPUS:85096926563
T3 - MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings
SP - 606
EP - 609
BT - MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings
PB - VDE Verlag GmbH
T2 - MikroSystemTechnik Kongress 2015: MEMS, Mikroelektronik, Systeme - MikroSystemTechnik Conference 2015: MEMS, Microelectronics, Systems
Y2 - 26 October 2015 through 28 October 2015
ER -