Design optimization of induction heater in planetary reactors for semiconductor industry

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OriginalspracheEnglisch
Titel des SammelwerksEnergy systems, materials and designing in mechanical engineering
Untertitelselected, peer reviewed papers from the International Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy", June 9-12, 2015, Novosibirsk, Russia
ErscheinungsortPfaffikon
Seiten505-510
PublikationsstatusVeröffentlicht - 2015
VeranstaltungInternational Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy" - Novosibirsk, Russland
Dauer: 9 Juni 201512 Juni 2015

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NameApplied mechanics and materials
Band792

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Design optimization of induction heater in planetary reactors for semiconductor industry. / Nikanorov, Alexandre; Nacke, Bernard; Zedler, T.
Energy systems, materials and designing in mechanical engineering: selected, peer reviewed papers from the International Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy", June 9-12, 2015, Novosibirsk, Russia. Pfaffikon, 2015. S. 505-510 (Applied mechanics and materials; Band 792).

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschung

Nikanorov, A, Nacke, B & Zedler, T 2015, Design optimization of induction heater in planetary reactors for semiconductor industry. in Energy systems, materials and designing in mechanical engineering: selected, peer reviewed papers from the International Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy", June 9-12, 2015, Novosibirsk, Russia. Applied mechanics and materials, Bd. 792, Pfaffikon, S. 505-510, International Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy" , Novosibirsk, Russland, 9 Juni 2015.
Nikanorov, A., Nacke, B., & Zedler, T. (2015). Design optimization of induction heater in planetary reactors for semiconductor industry. In Energy systems, materials and designing in mechanical engineering: selected, peer reviewed papers from the International Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy", June 9-12, 2015, Novosibirsk, Russia (S. 505-510). (Applied mechanics and materials; Band 792)..
Nikanorov A, Nacke B, Zedler T. Design optimization of induction heater in planetary reactors for semiconductor industry. in Energy systems, materials and designing in mechanical engineering: selected, peer reviewed papers from the International Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy", June 9-12, 2015, Novosibirsk, Russia. Pfaffikon. 2015. S. 505-510. (Applied mechanics and materials).
Nikanorov, Alexandre ; Nacke, Bernard ; Zedler, T. / Design optimization of induction heater in planetary reactors for semiconductor industry. Energy systems, materials and designing in mechanical engineering: selected, peer reviewed papers from the International Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy", June 9-12, 2015, Novosibirsk, Russia. Pfaffikon, 2015. S. 505-510 (Applied mechanics and materials).
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title = "Design optimization of induction heater in planetary reactors for semiconductor industry",
author = "Alexandre Nikanorov and Bernard Nacke and T. Zedler",
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TY - GEN

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AU - Nikanorov, Alexandre

AU - Nacke, Bernard

AU - Zedler, T.

PY - 2015

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M3 - Conference contribution

SN - 978-3-03835-548-9

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