Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Integrated Optics |
| Untertitel | Devices, Materials, and Technologies XXIV |
| Herausgeber/-innen | Sonia M. Garcia-Blanco, Pavel Cheben |
| Herausgeber (Verlag) | SPIE |
| ISBN (elektronisch) | 9781510633292 |
| Publikationsstatus | Veröffentlicht - 25 Feb. 2020 |
| Extern publiziert | Ja |
| Veranstaltung | Integrated Optics: Devices, Materials, and Technologies XXIV 2020 - San Francisco, USA / Vereinigte Staaten Dauer: 3 Feb. 2020 → 6 Feb. 2020 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Band | 11283 |
| ISSN (Print) | 0277-786X |
| ISSN (elektronisch) | 1996-756X |
Abstract
An integrated refractive index gas sensor working in the Mid infrared (MIR) region and utilizing suspended silicon waveguide is presented. Although many integrated refractive index gas sensors have been proposed in the literatures, their operating wavelength is limited to the near infrared range. Our proposed gas sensors can operate in the mid infrared up to 10μm, were many gases have their absorption fingerprints in order to enhance the sensing performance. A finite difference solver is used to perform the sensitivity analysis of the suspended silicon waveguide in the MIR range for gaseous medium. The analysis shows that a suspended silicon waveguide can achieve high waveguide sensitivity with a minimal mode loss. Thus, we designed a high performance Mach Zehnder Interferometer (MZI) gas sensor using a suspended silicon waveguide as the sensing arm. Three dimensional finite difference time domain (3D-FDTD) solver is used in the design and optimization of two designs. One for the wavelength interrogation scheme of detection and another one for the intensity interrogation scheme. The first design, exhibits high wavelength sensitivity S=7028 nm/RIU and can reach high figure of merit (FOM) of around 180 RIU-1 for both wavelength and intensity interrogation methods with only 250μm sensing arm length. The second design furtherly enhances the intensity interrogation FOM to reach 370RIU-1 at the same length. Intensity interrogation needs only a laser source and a detector. Hence, using our sensor in intensity interrogation based read-out offers compact, low cost and mass scale fabrication which makes our proposed sensor a good platform for lab on chip technology.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
Zitieren
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- BibTex
- RIS
Integrated Optics: Devices, Materials, and Technologies XXIV. Hrsg. / Sonia M. Garcia-Blanco; Pavel Cheben. SPIE, 2020. 112831K (Proceedings of SPIE - The International Society for Optical Engineering; Band 11283).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Design and fabrication of multilayer GRIN lenses by multi-material additive manufacturing for light coupling applications in planar optoelectronic systems
AU - Rezaei, Hossein S.
AU - Hohenhoff, Gerrit
AU - Jaeschke, Peter
AU - Kaierle, Stefan
AU - Overmeyer, Ludger
N1 - Funding Information: We gratefully acknowledge financial support from Lower Saxony Ministry of Science and Culture (MWK) within the PhD program Tailored Light. The authors would also like to acknowledge Institut fur Transport- und Automatisierungstechnik of Leibniz University Hannover for supporting with the beam profilometry.
PY - 2020/2/25
Y1 - 2020/2/25
N2 - An integrated refractive index gas sensor working in the Mid infrared (MIR) region and utilizing suspended silicon waveguide is presented. Although many integrated refractive index gas sensors have been proposed in the literatures, their operating wavelength is limited to the near infrared range. Our proposed gas sensors can operate in the mid infrared up to 10μm, were many gases have their absorption fingerprints in order to enhance the sensing performance. A finite difference solver is used to perform the sensitivity analysis of the suspended silicon waveguide in the MIR range for gaseous medium. The analysis shows that a suspended silicon waveguide can achieve high waveguide sensitivity with a minimal mode loss. Thus, we designed a high performance Mach Zehnder Interferometer (MZI) gas sensor using a suspended silicon waveguide as the sensing arm. Three dimensional finite difference time domain (3D-FDTD) solver is used in the design and optimization of two designs. One for the wavelength interrogation scheme of detection and another one for the intensity interrogation scheme. The first design, exhibits high wavelength sensitivity S=7028 nm/RIU and can reach high figure of merit (FOM) of around 180 RIU-1 for both wavelength and intensity interrogation methods with only 250μm sensing arm length. The second design furtherly enhances the intensity interrogation FOM to reach 370RIU-1 at the same length. Intensity interrogation needs only a laser source and a detector. Hence, using our sensor in intensity interrogation based read-out offers compact, low cost and mass scale fabrication which makes our proposed sensor a good platform for lab on chip technology.
AB - An integrated refractive index gas sensor working in the Mid infrared (MIR) region and utilizing suspended silicon waveguide is presented. Although many integrated refractive index gas sensors have been proposed in the literatures, their operating wavelength is limited to the near infrared range. Our proposed gas sensors can operate in the mid infrared up to 10μm, were many gases have their absorption fingerprints in order to enhance the sensing performance. A finite difference solver is used to perform the sensitivity analysis of the suspended silicon waveguide in the MIR range for gaseous medium. The analysis shows that a suspended silicon waveguide can achieve high waveguide sensitivity with a minimal mode loss. Thus, we designed a high performance Mach Zehnder Interferometer (MZI) gas sensor using a suspended silicon waveguide as the sensing arm. Three dimensional finite difference time domain (3D-FDTD) solver is used in the design and optimization of two designs. One for the wavelength interrogation scheme of detection and another one for the intensity interrogation scheme. The first design, exhibits high wavelength sensitivity S=7028 nm/RIU and can reach high figure of merit (FOM) of around 180 RIU-1 for both wavelength and intensity interrogation methods with only 250μm sensing arm length. The second design furtherly enhances the intensity interrogation FOM to reach 370RIU-1 at the same length. Intensity interrogation needs only a laser source and a detector. Hence, using our sensor in intensity interrogation based read-out offers compact, low cost and mass scale fabrication which makes our proposed sensor a good platform for lab on chip technology.
KW - Additive manufacturing
KW - Aerosol jet printing
KW - GRIN lens
KW - Multi-material printing
KW - Optical photopolymers
KW - Planar optoelectronic systems
UR - http://www.scopus.com/inward/record.url?scp=85083369717&partnerID=8YFLogxK
U2 - 10.1117/12.2545914
DO - 10.1117/12.2545914
M3 - Conference contribution
AN - SCOPUS:85083369717
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Integrated Optics
A2 - Garcia-Blanco, Sonia M.
A2 - Cheben, Pavel
PB - SPIE
T2 - Integrated Optics: Devices, Materials, and Technologies XXIV 2020
Y2 - 3 February 2020 through 6 February 2020
ER -