Details
| Originalsprache | Englisch |
|---|---|
| Seiten (von - bis) | 7851-7857 |
| Seitenumfang | 7 |
| Fachzeitschrift | Applied Optics |
| Jahrgang | 45 |
| Ausgabenummer | 30 |
| Publikationsstatus | Veröffentlicht - 20 Okt. 2006 |
| Extern publiziert | Ja |
Abstract
Gradient index coatings and optical filters are a challenge for fabrication. In a round-robin experiment, basically the same hybrid antireflection coating for the visible spectral region, combining homogeneous refractive index layers of pure materials and linear gradient refractive index layers of material mixtures, has been deposited. The experiment involved three different deposition techniques: electron-beam evaporation, ion-beam sputtering, and radio frequency magnetron sputtering. The material combinations used by these techniques were Nb2O5/SiO2, TiO 2/SiO2, and Ta2O5/SiO2, respectively. The spectral performances of samples coated on one side and on both sides have been compared to the corresponding theoretical spectra of the designed profile. Also, the reproducibility of results for each process is verified. Finally, it is shown that ion-beam sputtering gave the best results in terms of deviation from the theoretical performance and reproducibility.
ASJC Scopus Sachgebiete
- Physik und Astronomie (insg.)
- Atom- und Molekularphysik sowie Optik
- Ingenieurwesen (insg.)
- Ingenieurwesen (sonstige)
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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in: Applied Optics, Jahrgang 45, Nr. 30, 20.10.2006, S. 7851-7857.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating
AU - Janicki, Vesna
AU - Gäbler, Dieter
AU - Wilbrandt, Steffen
AU - Leitel, Robert
AU - Stenzel, Olaf
AU - Kaiser, Norbert
AU - Lappschies, Marc
AU - Görtz, Björn
AU - Ristau, Detlev
AU - Rickers, Christoph
AU - Vergöhl, Michael
PY - 2006/10/20
Y1 - 2006/10/20
N2 - Gradient index coatings and optical filters are a challenge for fabrication. In a round-robin experiment, basically the same hybrid antireflection coating for the visible spectral region, combining homogeneous refractive index layers of pure materials and linear gradient refractive index layers of material mixtures, has been deposited. The experiment involved three different deposition techniques: electron-beam evaporation, ion-beam sputtering, and radio frequency magnetron sputtering. The material combinations used by these techniques were Nb2O5/SiO2, TiO 2/SiO2, and Ta2O5/SiO2, respectively. The spectral performances of samples coated on one side and on both sides have been compared to the corresponding theoretical spectra of the designed profile. Also, the reproducibility of results for each process is verified. Finally, it is shown that ion-beam sputtering gave the best results in terms of deviation from the theoretical performance and reproducibility.
AB - Gradient index coatings and optical filters are a challenge for fabrication. In a round-robin experiment, basically the same hybrid antireflection coating for the visible spectral region, combining homogeneous refractive index layers of pure materials and linear gradient refractive index layers of material mixtures, has been deposited. The experiment involved three different deposition techniques: electron-beam evaporation, ion-beam sputtering, and radio frequency magnetron sputtering. The material combinations used by these techniques were Nb2O5/SiO2, TiO 2/SiO2, and Ta2O5/SiO2, respectively. The spectral performances of samples coated on one side and on both sides have been compared to the corresponding theoretical spectra of the designed profile. Also, the reproducibility of results for each process is verified. Finally, it is shown that ion-beam sputtering gave the best results in terms of deviation from the theoretical performance and reproducibility.
UR - http://www.scopus.com/inward/record.url?scp=33751377957&partnerID=8YFLogxK
U2 - 10.1364/AO.45.007851
DO - 10.1364/AO.45.007851
M3 - Article
AN - SCOPUS:33751377957
VL - 45
SP - 7851
EP - 7857
JO - Applied Optics
JF - Applied Optics
SN - 1559-128X
IS - 30
ER -