Details
Originalsprache | Englisch |
---|---|
Titel des Sammelwerks | 12th International Conference on Machine Vision, ICMV 2019 |
Herausgeber/-innen | Wolfgang Osten, Dmitry Nikolaev, Jianhong Zhou |
Erscheinungsort | Bellingham |
Herausgeber (Verlag) | SPIE |
Seitenumfang | 8 |
ISBN (elektronisch) | 9781510636439 |
Publikationsstatus | Veröffentlicht - 31 Jan. 2020 |
Veranstaltung | 12th International Conference on Machine Vision, ICMV 2019 - Amsterdam, Niederlande Dauer: 16 Nov. 2019 → 18 Nov. 2019 |
Abstract
Scanning electron microscopes (SEM) are widely used to analyse the morphology of all kind of specimen providing high resolution image data. To overcome the two-dimensional limitation, a lot of effort has been put into the recovery of the hidden third dimension based on the acquired SEM images throughout the last decades. Especially methods based on photogrammetry were identified to yield qualitatively good reconstruction results. Nevertheless, precise quantitative 3D measurements still remain a challenge. One of the key problems is the robust estimation of the motion in the acquired image sequences. A possible solution is given by the factorization method for orthographic image streams. To evaluate the applicability of this algorithm on SEM image sequences, the motion for several sequences is estimated and compared to the stage settings. Furthermore, the method is extended to obtain a dense reconstruction from a stereo-pair based on the estimated rotations between the two views. The final reconstruction results are compared to reference measurements with a confocal laser scanning microscope for a quantitative evaluation.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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- BibTex
- RIS
12th International Conference on Machine Vision, ICMV 2019. Hrsg. / Wolfgang Osten; Dmitry Nikolaev; Jianhong Zhou. Bellingham: SPIE, 2020. 1143333.
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Dense structure and motion recovery from scanning electron microscope image sequences based on factorization
AU - Töberg, Stefan
AU - Reithmeier, Eduard
PY - 2020/1/31
Y1 - 2020/1/31
N2 - Scanning electron microscopes (SEM) are widely used to analyse the morphology of all kind of specimen providing high resolution image data. To overcome the two-dimensional limitation, a lot of effort has been put into the recovery of the hidden third dimension based on the acquired SEM images throughout the last decades. Especially methods based on photogrammetry were identified to yield qualitatively good reconstruction results. Nevertheless, precise quantitative 3D measurements still remain a challenge. One of the key problems is the robust estimation of the motion in the acquired image sequences. A possible solution is given by the factorization method for orthographic image streams. To evaluate the applicability of this algorithm on SEM image sequences, the motion for several sequences is estimated and compared to the stage settings. Furthermore, the method is extended to obtain a dense reconstruction from a stereo-pair based on the estimated rotations between the two views. The final reconstruction results are compared to reference measurements with a confocal laser scanning microscope for a quantitative evaluation.
AB - Scanning electron microscopes (SEM) are widely used to analyse the morphology of all kind of specimen providing high resolution image data. To overcome the two-dimensional limitation, a lot of effort has been put into the recovery of the hidden third dimension based on the acquired SEM images throughout the last decades. Especially methods based on photogrammetry were identified to yield qualitatively good reconstruction results. Nevertheless, precise quantitative 3D measurements still remain a challenge. One of the key problems is the robust estimation of the motion in the acquired image sequences. A possible solution is given by the factorization method for orthographic image streams. To evaluate the applicability of this algorithm on SEM image sequences, the motion for several sequences is estimated and compared to the stage settings. Furthermore, the method is extended to obtain a dense reconstruction from a stereo-pair based on the estimated rotations between the two views. The final reconstruction results are compared to reference measurements with a confocal laser scanning microscope for a quantitative evaluation.
KW - Dense reconstruction
KW - Factorization
KW - Motion
KW - Quantitative evaluation
KW - Scanning electron microscope
KW - Structure
UR - http://www.scopus.com/inward/record.url?scp=85081175342&partnerID=8YFLogxK
U2 - 10.1117/12.2556372
DO - 10.1117/12.2556372
M3 - Conference contribution
AN - SCOPUS:85081175342
BT - 12th International Conference on Machine Vision, ICMV 2019
A2 - Osten, Wolfgang
A2 - Nikolaev, Dmitry
A2 - Zhou, Jianhong
PB - SPIE
CY - Bellingham
T2 - 12th International Conference on Machine Vision, ICMV 2019
Y2 - 16 November 2019 through 18 November 2019
ER -