Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | 2022 Solid-State Sensors, Actuators and Microsystems Workshop Technical Digest |
| Herausgeber/-innen | Reza Ghodssi, Jenna F. Chan |
| Seiten | 448-449 |
| Seitenumfang | 2 |
| ISBN (elektronisch) | 9781940470047 |
| Publikationsstatus | Veröffentlicht - 2022 |
| Veranstaltung | 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022 - Hilton Head, USA / Vereinigte Staaten Dauer: 5 Juni 2022 → 9 Juni 2022 |
Abstract
Employing co-resonant coupling in dynamic-mode cantilever MEMS sensors has the potential for a significant increase in sensitivity while maintaining a reliable oscillation detection. However, the resulting complex interplay between the micro- and nanocantilever has to be carefully considered for application-specific sensor design as it impacts all relevant sensor properties, such as linearity, stability and detectivity. Here, an overview of key parameters, their dependence on the strength of co-resonance and resulting consequences for sensor performance is provided.
ASJC Scopus Sachgebiete
- Informatik (insg.)
- Hardware und Architektur
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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- BibTex
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2022 Solid-State Sensors, Actuators and Microsystems Workshop Technical Digest. Hrsg. / Reza Ghodssi; Jenna F. Chan. 2022. S. 448-449.
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Co-Resonant cantilevers for materials research and sensor applications
AU - Körner, Julia
N1 - Funding Information: The reported work is funded by the German Research Foundation DFG (grant number KO5508/3-1). Furthermore, the author would like to thank Christopher F. Reiche for critical review of this manuscript.
PY - 2022
Y1 - 2022
N2 - Employing co-resonant coupling in dynamic-mode cantilever MEMS sensors has the potential for a significant increase in sensitivity while maintaining a reliable oscillation detection. However, the resulting complex interplay between the micro- and nanocantilever has to be carefully considered for application-specific sensor design as it impacts all relevant sensor properties, such as linearity, stability and detectivity. Here, an overview of key parameters, their dependence on the strength of co-resonance and resulting consequences for sensor performance is provided.
AB - Employing co-resonant coupling in dynamic-mode cantilever MEMS sensors has the potential for a significant increase in sensitivity while maintaining a reliable oscillation detection. However, the resulting complex interplay between the micro- and nanocantilever has to be carefully considered for application-specific sensor design as it impacts all relevant sensor properties, such as linearity, stability and detectivity. Here, an overview of key parameters, their dependence on the strength of co-resonance and resulting consequences for sensor performance is provided.
KW - Cantilever sensor
KW - co-resonant coupling
KW - dynamic-mode
KW - linearity
KW - sensitivity
KW - stability
UR - http://www.scopus.com/inward/record.url?scp=85172655855&partnerID=8YFLogxK
U2 - 10.31438/trf.hh2022.115
DO - 10.31438/trf.hh2022.115
M3 - Conference contribution
AN - SCOPUS:85172655855
SP - 448
EP - 449
BT - 2022 Solid-State Sensors, Actuators and Microsystems Workshop Technical Digest
A2 - Ghodssi, Reza
A2 - Chan, Jenna F.
T2 - 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022
Y2 - 5 June 2022 through 9 June 2022
ER -