Details
Originalsprache | Englisch |
---|---|
Seiten (von - bis) | 7604-7615 |
Seitenumfang | 12 |
Fachzeitschrift | Applied Optics |
Jahrgang | 51 |
Ausgabenummer | 31 |
Publikationsstatus | Veröffentlicht - 1 Nov. 2012 |
Abstract
We propose a general approach that allows one to reveal factors causing production errors in the course of the deposition process controlled by broadband optical monitoring. We consider computational experiments simulating the real deposition process as a crucial point of this approach. We demonstrate application of the approach using multiple experimental deposition runs of the selected multilayer coatings.
ASJC Scopus Sachgebiete
- Physik und Astronomie (insg.)
- Atom- und Molekularphysik sowie Optik
- Ingenieurwesen (insg.)
- Ingenieurwesen (sonstige)
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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in: Applied Optics, Jahrgang 51, Nr. 31, 01.11.2012, S. 7604-7615.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - Computational manufacturing as a key element in the design–production chain for modern multilayer coatings
AU - Amotchkina, Tatiana V.
AU - Schlichting, Sebastian
AU - Ehlers, Henrik
AU - Trubetskov, Michael K.
AU - Tikhonravov, Alexander V.
AU - Ristau, Detlev
PY - 2012/11/1
Y1 - 2012/11/1
N2 - We propose a general approach that allows one to reveal factors causing production errors in the course of the deposition process controlled by broadband optical monitoring. We consider computational experiments simulating the real deposition process as a crucial point of this approach. We demonstrate application of the approach using multiple experimental deposition runs of the selected multilayer coatings.
AB - We propose a general approach that allows one to reveal factors causing production errors in the course of the deposition process controlled by broadband optical monitoring. We consider computational experiments simulating the real deposition process as a crucial point of this approach. We demonstrate application of the approach using multiple experimental deposition runs of the selected multilayer coatings.
UR - http://www.scopus.com/inward/record.url?scp=84868360506&partnerID=8YFLogxK
U2 - 10.1364/AO.51.007604
DO - 10.1364/AO.51.007604
M3 - Article
AN - SCOPUS:84868360506
VL - 51
SP - 7604
EP - 7615
JO - Applied Optics
JF - Applied Optics
SN - 1559-128X
IS - 31
ER -