Comparison of algorithms used for optical characterization of multilayer optical coatings

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Autoren

  • Tatiana V. Amotchkina
  • Michael K. Trubetskov
  • Vladimir Pervak
  • Sebastian Schlichting
  • Henrik Ehlers
  • Detlev Ristau
  • Alexander V. Tikhonravov

Organisationseinheiten

Externe Organisationen

  • Lomonosov Moscow State University
  • Ludwig-Maximilians-Universität München (LMU)
  • Laser Zentrum Hannover e.V. (LZH)
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Seiten (von - bis)3389-3395
Seitenumfang7
FachzeitschriftApplied Optics
Jahrgang50
Ausgabenummer20
PublikationsstatusVeröffentlicht - 10 Juli 2011

Abstract

Two algorithms used for the on-line and off-line characterization of multilayer optical coatings are experimentally compared using test samples produced by two different deposition processes and different monitoring approaches. One of these algorithms, called the triangular algorithm, demonstrates its superiority in all considered situations. We performed experiments with multilayer samples formed by high-density thin films, which allowed us to neglect possible errors in the film refractive indices and concentrate only on errors in the thicknesses of the layers of the produced coatings.

ASJC Scopus Sachgebiete

Zitieren

Comparison of algorithms used for optical characterization of multilayer optical coatings. / Amotchkina, Tatiana V.; Trubetskov, Michael K.; Pervak, Vladimir et al.
in: Applied Optics, Jahrgang 50, Nr. 20, 10.07.2011, S. 3389-3395.

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Amotchkina, TV, Trubetskov, MK, Pervak, V, Schlichting, S, Ehlers, H, Ristau, D & Tikhonravov, AV 2011, 'Comparison of algorithms used for optical characterization of multilayer optical coatings', Applied Optics, Jg. 50, Nr. 20, S. 3389-3395. https://doi.org/10.1364/AO.50.003389
Amotchkina, T. V., Trubetskov, M. K., Pervak, V., Schlichting, S., Ehlers, H., Ristau, D., & Tikhonravov, A. V. (2011). Comparison of algorithms used for optical characterization of multilayer optical coatings. Applied Optics, 50(20), 3389-3395. https://doi.org/10.1364/AO.50.003389
Amotchkina TV, Trubetskov MK, Pervak V, Schlichting S, Ehlers H, Ristau D et al. Comparison of algorithms used for optical characterization of multilayer optical coatings. Applied Optics. 2011 Jul 10;50(20):3389-3395. doi: 10.1364/AO.50.003389
Amotchkina, Tatiana V. ; Trubetskov, Michael K. ; Pervak, Vladimir et al. / Comparison of algorithms used for optical characterization of multilayer optical coatings. in: Applied Optics. 2011 ; Jahrgang 50, Nr. 20. S. 3389-3395.
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