Details
| Originalsprache | Englisch |
|---|---|
| Seiten (von - bis) | 76-80 |
| Seitenumfang | 5 |
| Fachzeitschrift | Proceedings of SPIE - The International Society for Optical Engineering |
| Jahrgang | 688 |
| Publikationsstatus | Veröffentlicht - 9 Apr. 1987 |
| Extern publiziert | Ja |
| Veranstaltung | 30th Annual Technical Symposium - San Diego , USA / Vereinigte Staaten Dauer: 1 Aug. 1986 → 3 Aug. 1986 |
Abstract
A reflectometer has been set up at the radiometric laboratory of PTB at the Berlin electron storage ring BESSY. Special attention has been paid to optimize the instrumentation for the characterization of multilayer structures suitable for laboratory soft x-ray laser research. The instrumentation is described and its performance demonstrated showing examples of optical component characterization.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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in: Proceedings of SPIE - The International Society for Optical Engineering, Jahrgang 688, 09.04.1987, S. 76-80.
Publikation: Beitrag in Fachzeitschrift › Konferenzaufsatz in Fachzeitschrift › Forschung › Peer-Review
}
TY - JOUR
T1 - Characterization of multilayer structures for soft x-ray laser research
AU - Kühne, M.
AU - Danzmann, K.
AU - Muller, P.
AU - Wende, B.
AU - Ceglio, N. M.
AU - Stearns, D. G.
AU - Hawryluk, A. M.
PY - 1987/4/9
Y1 - 1987/4/9
N2 - A reflectometer has been set up at the radiometric laboratory of PTB at the Berlin electron storage ring BESSY. Special attention has been paid to optimize the instrumentation for the characterization of multilayer structures suitable for laboratory soft x-ray laser research. The instrumentation is described and its performance demonstrated showing examples of optical component characterization.
AB - A reflectometer has been set up at the radiometric laboratory of PTB at the Berlin electron storage ring BESSY. Special attention has been paid to optimize the instrumentation for the characterization of multilayer structures suitable for laboratory soft x-ray laser research. The instrumentation is described and its performance demonstrated showing examples of optical component characterization.
UR - http://www.scopus.com/inward/record.url?scp=0023586338&partnerID=8YFLogxK
U2 - 10.1117/12.964825
DO - 10.1117/12.964825
M3 - Conference article
AN - SCOPUS:0023586338
VL - 688
SP - 76
EP - 80
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
SN - 0277-786X
T2 - 30th Annual Technical Symposium
Y2 - 1 August 1986 through 3 August 1986
ER -