Broad-band antireflection coatings deposited with ion-assisted evaporation

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Autoren

  • Sven Laux
  • Norbert Kaiser
  • Hansjoerg Niederwald
  • Michael Mertin
  • Henrik Ehlers
  • Detlev Ristau

Externe Organisationen

  • Carl Zeiss SMT GmbH
  • Laser Zentrum Hannover e.V. (LZH)
  • Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Titel des SammelwerksAdvances in Optical Interference Coatings
Untertitel25 - 27 May 1999, Berlin, Germany
ErscheinungsortBellingham
Seiten76-80
Seitenumfang5
PublikationsstatusVeröffentlicht - 7 Sept. 1999
Extern publiziertJa
Veranstaltung1999 Advances in Optical Interference Coatings - Berlin, Ger
Dauer: 25 Mai 199927 Mai 1999

Publikationsreihe

NameProceedings of SPIE - The International Society for Optical Engineering
Herausgeber (Verlag)SPIE
Band3738
ISSN (Print)0277-786X

Abstract

SiO2, Ta2O5, and MgF2 have been deposited by electron beam evaporation under bombardment of ions generated by three different ion or plasma sources. Multilayer systems containing 5 to 12 layers have been designed and realized. The maximum reflectance R of a glass/air interface can be reduced down to R<0.5% in a spectral region of 400 nm to 700 nm with each of these coating designs. The lowest average reflection can be obtained with a layer system containing MgF2. The absorption of such AR coatings mostly exceeds that of all-oxide systems in the shorter wavelength region (<450 nm). With scanning scratch tests the scratch resistance of the coatings have been determined relative to each other.

ASJC Scopus Sachgebiete

Zitieren

Broad-band antireflection coatings deposited with ion-assisted evaporation. / Laux, Sven; Kaiser, Norbert; Niederwald, Hansjoerg et al.
Advances in Optical Interference Coatings: 25 - 27 May 1999, Berlin, Germany. Bellingham, 1999. S. 76-80 (Proceedings of SPIE - The International Society for Optical Engineering; Band 3738).

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Laux, S, Kaiser, N, Niederwald, H, Mertin, M, Ehlers, H & Ristau, D 1999, Broad-band antireflection coatings deposited with ion-assisted evaporation. in Advances in Optical Interference Coatings: 25 - 27 May 1999, Berlin, Germany. Proceedings of SPIE - The International Society for Optical Engineering, Bd. 3738, Bellingham, S. 76-80, 1999 Advances in Optical Interference Coatings, Berlin, Ger, 25 Mai 1999. https://doi.org/10.1117/12.360066
Laux, S., Kaiser, N., Niederwald, H., Mertin, M., Ehlers, H., & Ristau, D. (1999). Broad-band antireflection coatings deposited with ion-assisted evaporation. In Advances in Optical Interference Coatings: 25 - 27 May 1999, Berlin, Germany (S. 76-80). (Proceedings of SPIE - The International Society for Optical Engineering; Band 3738).. https://doi.org/10.1117/12.360066
Laux S, Kaiser N, Niederwald H, Mertin M, Ehlers H, Ristau D. Broad-band antireflection coatings deposited with ion-assisted evaporation. in Advances in Optical Interference Coatings: 25 - 27 May 1999, Berlin, Germany. Bellingham. 1999. S. 76-80. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.360066
Laux, Sven ; Kaiser, Norbert ; Niederwald, Hansjoerg et al. / Broad-band antireflection coatings deposited with ion-assisted evaporation. Advances in Optical Interference Coatings: 25 - 27 May 1999, Berlin, Germany. Bellingham, 1999. S. 76-80 (Proceedings of SPIE - The International Society for Optical Engineering).
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