Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004 |
| Seiten | 125-129 |
| Seitenumfang | 5 |
| Publikationsstatus | Veröffentlicht - 2005 |
| Extern publiziert | Ja |
| Veranstaltung | 2004 IEEE International Frequency Control Symposium and Exposition. A Conference of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society (UFFC-S) - Montreal, Kanada Dauer: 23 Aug. 2004 → 27 Aug. 2004 |
Publikationsreihe
| Name | Proceedings of the IEEE International Frequency Control Symposium |
|---|---|
| ISSN (Print) | 1075-6787 |
Abstract
Process monitoring via self-sensing piezoelectric transducers was applied to wirebonding. Starting with a description of the state of the art in bond process monitoring, this paper introduces the concept of self-sensing piezoelectric transducers and reports first experimental results which have been obtained by using this technique.
ASJC Scopus Sachgebiete
- Ingenieurwesen (insg.)
- Allgemeiner Maschinenbau
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Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004. 2005. S. 125-129 (Proceedings of the IEEE International Frequency Control Symposium).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Bond Process Monitoring via Self-Sensing Piezoelectric Transducers
AU - Brökelmann, Michael
AU - Wallaschek, Jörg
AU - Hesse, Hans
N1 - Copyright: Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2005
Y1 - 2005
N2 - Process monitoring via self-sensing piezoelectric transducers was applied to wirebonding. Starting with a description of the state of the art in bond process monitoring, this paper introduces the concept of self-sensing piezoelectric transducers and reports first experimental results which have been obtained by using this technique.
AB - Process monitoring via self-sensing piezoelectric transducers was applied to wirebonding. Starting with a description of the state of the art in bond process monitoring, this paper introduces the concept of self-sensing piezoelectric transducers and reports first experimental results which have been obtained by using this technique.
KW - Bond quality
KW - Piezoelectric transducer
KW - Process monitoring
KW - Self-sensing
KW - Wirebond
UR - http://www.scopus.com/inward/record.url?scp=28744458863&partnerID=8YFLogxK
U2 - 10.1109/FREQ.2004.1418440
DO - 10.1109/FREQ.2004.1418440
M3 - Conference contribution
AN - SCOPUS:28744458863
SN - 0-7803-8414-8
T3 - Proceedings of the IEEE International Frequency Control Symposium
SP - 125
EP - 129
BT - Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004
T2 - 2004 IEEE International Frequency Control Symposium and Exposition. A Conference of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society (UFFC-S)
Y2 - 23 August 2004 through 27 August 2004
ER -