Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Autoren

  • James D. Claverley
  • Dong Yea Sheu
  • Arne Burisch
  • Richard K. Leach
  • Annika Raatz

Externe Organisationen

  • National Physical Laboratory
  • National Taipei University of Technology
  • Technische Universität Braunschweig
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Titel des SammelwerksProceedings
Untertitel2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011
PublikationsstatusVeröffentlicht - 30 Aug. 2011
Extern publiziertJa
Veranstaltung2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011 - Tampere, Finnland
Dauer: 25 Mai 201127 Mai 2011

Publikationsreihe

NameProceedings - 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011

Abstract

In this paper the assembly of a novel micro-scale coordinate measuring machine (CMM) probe is considered. A working micro-scale CMM probe is assembled from a MEMS device and a stylus produced by micro-electro-discharge machining. The production technique of the micro-scale parts is discussed and two methods for assembly are presented.

ASJC Scopus Sachgebiete

Zitieren

Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation. / Claverley, James D.; Sheu, Dong Yea; Burisch, Arne et al.
Proceedings: 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011. 2011. 5942327 (Proceedings - 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011).

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Claverley, JD, Sheu, DY, Burisch, A, Leach, RK & Raatz, A 2011, Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation. in Proceedings: 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011., 5942327, Proceedings - 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011, 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011, Tampere, Finnland, 25 Mai 2011. https://doi.org/10.1109/ISAM.2011.5942327
Claverley, J. D., Sheu, D. Y., Burisch, A., Leach, R. K., & Raatz, A. (2011). Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation. In Proceedings: 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011 Artikel 5942327 (Proceedings - 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011). https://doi.org/10.1109/ISAM.2011.5942327
Claverley JD, Sheu DY, Burisch A, Leach RK, Raatz A. Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation. in Proceedings: 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011. 2011. 5942327. (Proceedings - 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011). doi: 10.1109/ISAM.2011.5942327
Claverley, James D. ; Sheu, Dong Yea ; Burisch, Arne et al. / Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation. Proceedings: 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011. 2011. (Proceedings - 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011).
Download
@inproceedings{b1285e40162a4288a4a16d1a897b553b,
title = "Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation",
abstract = "In this paper the assembly of a novel micro-scale coordinate measuring machine (CMM) probe is considered. A working micro-scale CMM probe is assembled from a MEMS device and a stylus produced by micro-electro-discharge machining. The production technique of the micro-scale parts is discussed and two methods for assembly are presented.",
keywords = "desktop factory, MEMS, micro-assembly, micro-CMM, prototyping, semi-automation",
author = "Claverley, {James D.} and Sheu, {Dong Yea} and Arne Burisch and Leach, {Richard K.} and Annika Raatz",
year = "2011",
month = aug,
day = "30",
doi = "10.1109/ISAM.2011.5942327",
language = "English",
isbn = "9781612843438",
series = "Proceedings - 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011",
booktitle = "Proceedings",
note = "2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011 ; Conference date: 25-05-2011 Through 27-05-2011",

}

Download

TY - GEN

T1 - Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation

AU - Claverley, James D.

AU - Sheu, Dong Yea

AU - Burisch, Arne

AU - Leach, Richard K.

AU - Raatz, Annika

PY - 2011/8/30

Y1 - 2011/8/30

N2 - In this paper the assembly of a novel micro-scale coordinate measuring machine (CMM) probe is considered. A working micro-scale CMM probe is assembled from a MEMS device and a stylus produced by micro-electro-discharge machining. The production technique of the micro-scale parts is discussed and two methods for assembly are presented.

AB - In this paper the assembly of a novel micro-scale coordinate measuring machine (CMM) probe is considered. A working micro-scale CMM probe is assembled from a MEMS device and a stylus produced by micro-electro-discharge machining. The production technique of the micro-scale parts is discussed and two methods for assembly are presented.

KW - desktop factory

KW - MEMS

KW - micro-assembly

KW - micro-CMM

KW - prototyping

KW - semi-automation

UR - http://www.scopus.com/inward/record.url?scp=80052072213&partnerID=8YFLogxK

U2 - 10.1109/ISAM.2011.5942327

DO - 10.1109/ISAM.2011.5942327

M3 - Conference contribution

AN - SCOPUS:80052072213

SN - 9781612843438

T3 - Proceedings - 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011

BT - Proceedings

T2 - 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011

Y2 - 25 May 2011 through 27 May 2011

ER -

Von denselben Autoren