Antimony-mediated growth of epitaxial Ge1-yCy layers on Si(001)

Publikation: Beitrag in FachzeitschriftArtikelForschungPeer-Review

Autoren

  • H. J. Osten
  • E. Bugiel
  • P. Zaumseil

Externe Organisationen

  • Leibniz-Institut für innovative Mikroelektronik (IHP)
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Seiten (von - bis)322-326
Seitenumfang5
FachzeitschriftJournal of crystal growth
Jahrgang142
Ausgabenummer3-4
PublikationsstatusVeröffentlicht - 2 Sept. 1994
Extern publiziertJa

Abstract

Ge1-yCy layers were grown epitaxially on Si(001) with molecular beam epitaxy. The Stranski-Krastanov islanding can be completely suppressed by using the surfactant growth technique. We could not observe any interference between the presence of the antimony monolayer and the carbon incorporation into the growing Ge layer. The degree of relaxation determined independent of X-ray diffraction and transmission electron microscopy investigations is surprisingly low. Also, the onset of relaxation is significantly delayed. The Ge1-yCy layer does not behave identically with a pseudomorphic Ge film with an artificially reduced strain; it should therefore rather be considered as a new material with its own specific strain degree.

ASJC Scopus Sachgebiete

Zitieren

Antimony-mediated growth of epitaxial Ge1-yCy layers on Si(001). / Osten, H. J.; Bugiel, E.; Zaumseil, P.
in: Journal of crystal growth, Jahrgang 142, Nr. 3-4, 02.09.1994, S. 322-326.

Publikation: Beitrag in FachzeitschriftArtikelForschungPeer-Review

Osten HJ, Bugiel E, Zaumseil P. Antimony-mediated growth of epitaxial Ge1-yCy layers on Si(001). Journal of crystal growth. 1994 Sep 2;142(3-4):322-326. doi: 10.1016/0022-0248(94)90339-5
Osten, H. J. ; Bugiel, E. ; Zaumseil, P. / Antimony-mediated growth of epitaxial Ge1-yCy layers on Si(001). in: Journal of crystal growth. 1994 ; Jahrgang 142, Nr. 3-4. S. 322-326.
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