Details
| Originalsprache | Englisch |
|---|---|
| Seiten (von - bis) | 139-158 |
| Seitenumfang | 20 |
| Fachzeitschrift | Archive for Rational Mechanics and Analysis |
| Jahrgang | 207 |
| Ausgabenummer | 1 |
| Publikationsstatus | Veröffentlicht - Jan. 2013 |
Abstract
We investigate a free boundary problem describing small deformations in a membrane based model of electrostatically actuated microelectromechanical systems (MEMS). The existence of stationary solutions is established for small voltage values and non-existence is obtained for high voltage values. We give a justification of the widely studied narrow-gap model by showing that steady state solutions of the free boundary problem converge toward stationary solutions of the narrow-gap model when the aspect ratio of the device tends to zero.
ASJC Scopus Sachgebiete
- Mathematik (insg.)
- Analysis
- Mathematik (insg.)
- Mathematik (sonstige)
- Ingenieurwesen (insg.)
- Maschinenbau
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in: Archive for Rational Mechanics and Analysis, Jahrgang 207, Nr. 1, 01.2013, S. 139-158.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - A stationary free boundary problem modeling electrostatic MEMS
AU - Laurençot, Philippe
AU - Walker, Christoph
N1 - Copyright: Copyright 2021 Elsevier B.V., All rights reserved.
PY - 2013/1
Y1 - 2013/1
N2 - We investigate a free boundary problem describing small deformations in a membrane based model of electrostatically actuated microelectromechanical systems (MEMS). The existence of stationary solutions is established for small voltage values and non-existence is obtained for high voltage values. We give a justification of the widely studied narrow-gap model by showing that steady state solutions of the free boundary problem converge toward stationary solutions of the narrow-gap model when the aspect ratio of the device tends to zero.
AB - We investigate a free boundary problem describing small deformations in a membrane based model of electrostatically actuated microelectromechanical systems (MEMS). The existence of stationary solutions is established for small voltage values and non-existence is obtained for high voltage values. We give a justification of the widely studied narrow-gap model by showing that steady state solutions of the free boundary problem converge toward stationary solutions of the narrow-gap model when the aspect ratio of the device tends to zero.
UR - http://www.scopus.com/inward/record.url?scp=84872000564&partnerID=8YFLogxK
U2 - 10.1007/s00205-012-0559-7
DO - 10.1007/s00205-012-0559-7
M3 - Article
AN - SCOPUS:84872000564
VL - 207
SP - 139
EP - 158
JO - Archive for Rational Mechanics and Analysis
JF - Archive for Rational Mechanics and Analysis
SN - 0003-9527
IS - 1
ER -