Details
Originalsprache | Englisch |
---|---|
Seiten (von - bis) | 89-97 |
Seitenumfang | 9 |
Fachzeitschrift | CIRP Journal of Manufacturing Science and Technology |
Jahrgang | 6 |
Ausgabenummer | 2 |
Publikationsstatus | Veröffentlicht - 7 März 2013 |
Abstract
A compact contactless planar positioning stage is introduced which is based on a new fluid-dynamic drive principle. A defined thrust force generation is obtained by the controlled injection of free fluid jets on periodic structures that are part of the slide. Aerostatic bearings ensure a constant air gap independent of the load case. Following the background and goals of the project, the operating principle is explained. The design of a first linear prototype is supported by analytic and numerical analyses (CFD). Experimental results show a high capability for precision applications. Finally, a concept for a planar stage is introduced.
ASJC Scopus Sachgebiete
- Ingenieurwesen (insg.)
- Wirtschaftsingenieurwesen und Fertigungstechnik
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in: CIRP Journal of Manufacturing Science and Technology, Jahrgang 6, Nr. 2, 07.03.2013, S. 89-97.
Publikation: Beitrag in Fachzeitschrift › Übersichtsarbeit › Forschung › Peer-Review
}
TY - JOUR
T1 - A novel fluid-dynamic drive principle for desktop machines
AU - Denkena, B.
AU - Möhring, H. C.
AU - Kayapinar, H.
N1 - Funding information: The authors would like to thank the German research foundation ( Deutsche Forschungsgemeinschaft, DFG ) for its support and funding of the associated research project within the priority program SPP1476.
PY - 2013/3/7
Y1 - 2013/3/7
N2 - A compact contactless planar positioning stage is introduced which is based on a new fluid-dynamic drive principle. A defined thrust force generation is obtained by the controlled injection of free fluid jets on periodic structures that are part of the slide. Aerostatic bearings ensure a constant air gap independent of the load case. Following the background and goals of the project, the operating principle is explained. The design of a first linear prototype is supported by analytic and numerical analyses (CFD). Experimental results show a high capability for precision applications. Finally, a concept for a planar stage is introduced.
AB - A compact contactless planar positioning stage is introduced which is based on a new fluid-dynamic drive principle. A defined thrust force generation is obtained by the controlled injection of free fluid jets on periodic structures that are part of the slide. Aerostatic bearings ensure a constant air gap independent of the load case. Following the background and goals of the project, the operating principle is explained. The design of a first linear prototype is supported by analytic and numerical analyses (CFD). Experimental results show a high capability for precision applications. Finally, a concept for a planar stage is introduced.
KW - Desktop machine
KW - Fluidic drive
KW - Machine
KW - Planar drive
KW - Positioning
KW - Precision engineering
UR - http://www.scopus.com/inward/record.url?scp=84876301749&partnerID=8YFLogxK
U2 - 10.1016/j.cirpj.2013.02.001
DO - 10.1016/j.cirpj.2013.02.001
M3 - Review article
AN - SCOPUS:84876301749
VL - 6
SP - 89
EP - 97
JO - CIRP Journal of Manufacturing Science and Technology
JF - CIRP Journal of Manufacturing Science and Technology
SN - 1755-5817
IS - 2
ER -