3D-Oberflächenvermessung mit einem Stereo-Rasterelektronenmikroskop

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Autoren

  • Taras Vynnyk
  • Thomas Fahlbusch
  • Eduard Reithmeier

Organisationseinheiten

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Details

Titel in Übersetzung3D surface measurement with a scanning electron microscope
OriginalspracheDeutsch
Seiten (von - bis)496-502
Seitenumfang7
FachzeitschriftTechnisches Messen
Jahrgang76
Ausgabenummer11
PublikationsstatusVeröffentlicht - 4 Dez. 2009

Abstract

The measurement of technical surfaces with microstructures is a central question of metrology. In this paper the 3D reconstruction method of scanning electron microscope (SEM) images is introduced. For the verification of the method the SEM was provided with two detectors.

Schlagwörter

    Photometric method, Scanning electron microscope (SEM), Surface measurement

ASJC Scopus Sachgebiete

Zitieren

3D-Oberflächenvermessung mit einem Stereo-Rasterelektronenmikroskop. / Vynnyk, Taras; Fahlbusch, Thomas; Reithmeier, Eduard.
in: Technisches Messen, Jahrgang 76, Nr. 11, 04.12.2009, S. 496-502.

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Vynnyk T, Fahlbusch T, Reithmeier E. 3D-Oberflächenvermessung mit einem Stereo-Rasterelektronenmikroskop. Technisches Messen. 2009 Dez 4;76(11):496-502. doi: 10.1524/teme.2009.0898
Vynnyk, Taras ; Fahlbusch, Thomas ; Reithmeier, Eduard. / 3D-Oberflächenvermessung mit einem Stereo-Rasterelektronenmikroskop. in: Technisches Messen. 2009 ; Jahrgang 76, Nr. 11. S. 496-502.
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