3D-measurement with the stereo scanning electron microscope on sub-micrometer structures

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Autoren

  • T. Vynnyk
  • T. Schultheis
  • T. Fahlbusch
  • E. Reithmeier

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Details

OriginalspracheEnglisch
Aufsatznummer10038s
FachzeitschriftJournal of the European Optical Society
Jahrgang5
PublikationsstatusVeröffentlicht - 2010

Abstract

In this paper the photometric or the so called "shape from shading" method is presented. In comparison to existing methods the efficiency of the detector system was considered and the requirements of the cosine Lambert's law for the angle distribution of the emitted electrons are suppressed. This new method was experimentally verified by measuring a steel sphere, a holographic grating and a hologram.

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3D-measurement with the stereo scanning electron microscope on sub-micrometer structures. / Vynnyk, T.; Schultheis, T.; Fahlbusch, T. et al.
in: Journal of the European Optical Society, Jahrgang 5, 10038s, 2010.

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Vynnyk T, Schultheis T, Fahlbusch T, Reithmeier E. 3D-measurement with the stereo scanning electron microscope on sub-micrometer structures. Journal of the European Optical Society. 2010;5:10038s. doi: 10.2971/jeos.2010.10038s
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