3D-measurement using a scanning electron microscope

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Autoren

  • Eduard Reithmeier
  • Taras Vynnyk
  • Thanin Schultheis

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OriginalspracheEnglisch
Seiten (von - bis)1193-1201
Seitenumfang9
FachzeitschriftApplied Mathematics and Computation
Jahrgang217
Ausgabenummer3
PublikationsstatusVeröffentlicht - 1 Okt. 2010

Abstract

In this paper the improved photometric or the so called "Shape From Shading" method is presented. In comparison to known and established approaches the efficiency of the detector system was considered and the requirements of the cosine Lambert's law for the angle distribution of the emitted electrons are suppressed. The method retrieves more accurate data of sub-micrometer substructures like diffractive optical elements (DOE) due to an increased lateral resolution and works more efficiently than widely used comparable techniques.

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3D-measurement using a scanning electron microscope. / Reithmeier, Eduard; Vynnyk, Taras; Schultheis, Thanin.
in: Applied Mathematics and Computation, Jahrgang 217, Nr. 3, 01.10.2010, S. 1193-1201.

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Reithmeier, E, Vynnyk, T & Schultheis, T 2010, '3D-measurement using a scanning electron microscope', Applied Mathematics and Computation, Jg. 217, Nr. 3, S. 1193-1201. https://doi.org/10.1016/j.amc.2010.01.107
Reithmeier E, Vynnyk T, Schultheis T. 3D-measurement using a scanning electron microscope. Applied Mathematics and Computation. 2010 Okt 1;217(3):1193-1201. doi: 10.1016/j.amc.2010.01.107
Reithmeier, Eduard ; Vynnyk, Taras ; Schultheis, Thanin. / 3D-measurement using a scanning electron microscope. in: Applied Mathematics and Computation. 2010 ; Jahrgang 217, Nr. 3. S. 1193-1201.
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